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1. Magnification: SE image 10~60,000¹è
BSE image 10~30,000¹è
2. Observation mode: ±âº» µÎ°¡Áö µðÅØÅÍ---Secondary Electron Image(SE), Backscattered Electron Image(BSE)
3. Accelerating voltage: SE--5kV, 10kV, 15kV(3steps), BSE--10kV,15kV(2steps)
4. Specimen Stage: Manual control (X: 35mm, Y: 35mm)
5. Max. specimen size: 70mm Diameter x 50mm Height
6. Evaluation Time : Approx 3 minutes
7. EDS analytical system is optional.
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1. 1,000x ¿¡¼ ¾à 20,000x ÀÇ ¹èÀ²¿¡¼ °¡Àå ÇÕ¸®ÀûÀÎ °¡°ÝÀ¸·Î °íÇØ»óµµ À̹ÌÁö¸¦ ¾òÀ» ¼ö ÀÖ½À´Ï´Ù.
2. 0.02umÀÇ ÇØ»óµµ¿Í ±íÀº ½Éµµ(DOF)·Î ±¤ÇÐÇö¹Ì°æÀ¸·Î º¼ ¼ö ¾ø´Â ¿µ¿ªÀ» ÃøÁ¤ÇÒ ¼ö ÀÖ½À´Ï´Ù.
3. High Vacuum °ú Low Vacuum À» SE¿Í BSE µðÅØÅÍ ¾î¶²¸ðµå¿¡¼µµ ¼±ÅÃÇÏ¿© ÃøÁ¤ÀÌ °¡´ÉÇÕ´Ï´Ù.
4. 2Â÷ÀüÀÚ(SE)¿Í ÈĹæ»ê¶õ ÀüÀÚ(BSE)°¡ ±âº»ÀûÀ¸·Î ÀåÂøµÇ¾î ¸Å¿ì ´Ù¾çÇÑ »ùÇÃÀ» ÃøÁ¤ÀÌ °¡´ÉÇÕ´Ï´Ù.
ºñÀüµµ¼º ÀçÁúÀÇ »ùÇÃÀ» ÀÌ¿ÂÄÚÆþøÀÌ SE·Î ÃøÁ¤Çϱ⠾î·Á¿ï °æ¿ì, ÀúÁø°ø¿¡ °íÀü¾ÐÀÇ BSE·Î ÁÁÀº »ùÇÃÀÇ Ç¥¸é
À̹ÌÁö¸¦ º¸½Ç ¼ö ÀÖ½À´Ï´Ù.
5. ¾à 3ºÐÀÇ ¸Å¿ì ºü¸¥ ¼Óµµ·Î Áø°ø ½ÃÀÛºÎÅÍ ÃøÁ¤¿Ï·á±îÁö °¡´É ÇÕ´Ï´Ù.
6. 15kV, 10kV, 5kV ÀÇ ¼±ÅÃÀÌ °¡´ÉÇÕ´Ï´Ù.
7. °£ÆíÇÑ ÀÎÅÍÆäÀ̽º·Î ´©±¸³ª ½±°í ºü¸£°Ô ¹è¿ï ¼ö ÀÖ½À´Ï´Ù.
8. ½±°í ºü¸¥ º¸°í¼ ÀÛ¼ºÀÌ °¡´ÉÇÕ´Ï´Ù.
9. Ÿ»ç¿¡ ºñÇÏ¿© ÀÛ¾÷¹× ÃøÁ¤ ºÐ¼® ¼ÒÇÁÆ®¿þ¾î°¡ ¸Å¿ì ½±°í °£ÆíÇÏ´Ù°í »ç¿ëÀڵ鿡°ÔÈ£Æò ¹Þ½À´Ï´Ù.
10. Ÿ»çÁ¦Ç°°ú ´Þ¸® ¾ÆÁÖ ¿À·§µ¿¾È ³»±¸¼ºÀ» °¡Áö°í »ç¿ë °¡´ÉÇÏ´Ù.
11. Çʶó¸àÆ®
* °è»ê¼ ¹ßÇà ¿äû½Ã ¹ßÇà °¡´ÉÇÕ´Ï´Ù . (Ä«µå ±¸ÀԽà Á¦¿Ü )
* ¹«´Ü º¹À縦 ±ÝÇÕ´Ï´Ù .